Karl Franzens University Graz
Graz University of Technology
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Karl Franzens University Graz | Graz University of Technology | |
Three-Dimensional Nano-printing using Focused Electron Beam Induced Deposition: Design, Simulation and Experiments Nanotechnology urgently requires methods for direct 3D fabrication to access materials properties specific to 3D architectures. Direct–write, additive manufacturing using layer-by-layer deposition, or 3D printing, has emerged in recent years as a method to deposit truly 3D objects, at least over the macro- to micro-length scales. Unfortunately, 3D nano-printing methods are few. Focused electron beam-induced deposition, or FEBID, is one such 3D printing method where a focused electron beam is used to selectively dissociate surface bound precursor molecules delivered from the vapor phase. A computer–aided design environment specific to FEBID will be presented that makes the deposition of 3D complex geometries possible. Specifically, the 3D CAD environment facilitates the design and deposition of mesh style objects – examples will be presented for the deposition of metal and metal-carbon composite 3D objects. Example object geometries include cubes, icosahedron and bipyramids. A complementary simulation of FEBID will also be presented which serves as a predictive tool and aides in the design of more complex 3D deposits. The simulation is used to predict the primary electron beam coordinates and beam dwell times required for experimental 3D FEBID simplifying the design–to–experiment process flow which has historically been a mostly trial and error process. |