Karl Franzens University Graz
Graz University of Technology
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Karl Franzens University Graz | Graz University of Technology | |
Focused Electron/Ion Beam Induced deposition for the growth of metallic, magnetic and superconducting nanostructures Today, nanolithography is a key enabling technology in various research and application fields. Focused Electron/Ion Beam Induced Deposition (FEBID/FIBID) nanolithography techniques stand out for the growth of functional nanomaterials with high-resolution, and their use is widespread due to their implementation in FIB-SEM commercial equipment . In my talk, I will describe three applications of FEBID/FIBID. The first application concerns the use of FEBID for the growth of magnetic tips, with applications in magnetic resonance force microscopy, scanning nanowire magnetic force sensing and magnetic force microscopy . The second application to be discussed is the growth of superconducting nanostructures by FIBID and the potential applications for quantum sensing . The third application is based on the use of FIBID under cryogenic conditions (Cryo-FIBID), a new technique that has been applied to grow metallic W-C deposits, with 600-times enhancement in the growth speed when compared to standard room-temperature FIBID and with minimized ion-induced damage . Recent experiments of Cryo-FIBID with other precursors beyond W(CO)6 will be described. |