Institute of Solid State Physics


SS22WS22SS23WS23SS24WS24      Guidelines for Master Students

Deposition of Multi-Stimuli-Responsive Sensors and Study of their Response Range to Temperature
Sophie Marcelja
11:15 - 12:15 Wednesday 16 November 2022 PH1150

Thin hydrogel double layers (100 nm each) were deposited under varying conditions on plain Silicon, as well as nano-patterned substrates using initiated chemical vapor deposition. The resulting structure is a sensor responsive to multiple stimuli which are temperature, humidity and force. The application in mind for such sensors are electronic skins, which are becoming of interest in fields such as robotics, prosthetics and health monitoring.
The response of the fabricated samples to temperature was studied by exposing the samples to a liquid environment and measuring their change in thickness. Further, electrical measurements were conducted to examine the sensors’ sensitivity to temperature, humidity and force.