3D-Nanoprinting with Focused Particle Beams. From Fundamentals to Applications and Microrobots
Robert Winkler
Institute of Electron Microscopy, TU Graz
11:15 - 12:15 Wednesday 15 April 2026 While 3D printing down to the micrometer scale is already well established in research and development, only a few techniques enable controlled additive manufacturing at the nanoscale [1]. Among them are Focused Electron Beam Induced Deposition (FEBID) and Focused Ion Beam Induced Deposition (FIBID). In these techniques, a focused electron/ion beam locally decomposes adsorbed precursor molecules, thereby immobilizing them and enabling the direct writing of complex three-dimensional nanoarchitectures on a wide range of materials and substrate morphologies [2].
In this seminar, I will first introduce 3D nanoprinting with focused particle beams and outline its capabilities and limitations. I will then take the audience on a brief historical journey of 3D-FEBID at TU Graz - from the very first simple structures and fundamental growth studies [3] to key milestones on the way to a reliable 3D nanoprinting technology [4].
Selected application examples in the fields of scanning probe microscopy [5] and plasmonic nanostructures [6] will be presented. Very recent findings in 3D-printing using Nitrogen and Oxygen Ion beams will be unveiled. Finally, I will give an outlook on my ERC Starting Grant project, which targets multi-material 3D nanoprinting of microrobots.
References
[1] Hirt et al., Adv. Mater. 201604211, 1, (2017)
[2] Winkler et al., J. Appl. Phys. 125 (2019)
[3] Winkler et al., Addit. Manuf. 46, 102076 (2021)
[4] Fowlkes et al., ACS Omega 8(3), 3148-3175 (2023)
[5] Winkler et al., Nanomaterials 1217 (2023)
[6] Reisecker et al., Adv. Funct. Mater. 15339 (2025)
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Institute of Solid State Physics
