Field of Expertise: Advanced Material Science

Combining Small Angle X-ray Scattering and Deep X-Ray Lithography for material science
Benedetta Marmiroli
14:00 - 14:20 Thursday 24 October 2013 HS II, Alte Technik

Micro-nanotechnology has dissolved the borders among material science, chemistry and biology. The miniaturization of chemical and biological assays requires both a careful selection of the fabrication methods and the development of tailored materials for specific applications. As a consequence, interdisciplinarity is becoming fundamental in the combination of microfabrication and characterization techniques both aimed at the construction of new devices and at the development of novel materials for chemistry and biology applications. In this communication, we will present the advantages gained by combining two techniques: Deep X-ray Lithography (DXRL) for microfabrication and Small and Wide Angle X-ray Scattering (SAXS/WAXS) for investigation. On one hand DXRL makes it possible to improve SAXS time resolution and create new sample environments. In this respect, we will describe microdevices both for time resolved measurements of nanoparticles formation and for the study of the confined growth of crystals. On the other hand SAXS permits the investigation of the nanostructural morphology of the microstructures fabricated by DXRL, in order to tune the morphology for specific applications. For the latter, we will report some recent advances in the radiation assisted material synthesis and processing of new functional materials and structures with important applications in nano/biotechnology, for which characterization with SAXS/WAXS is fundamental.