Karl Franzens University Graz

Graz University of Technology 

Three-Dimensional Nano-printing using Focused Electron Beam Induced Deposition: Design, Simulation and Experiments
Dr. Jason Fowlkes
Oak Ridge National Laboratory, Tennessee, USA
17:15 - 18:15 Tuesday 31 October 2017 TUG P2

Nanotechnology urgently requires methods for direct 3D fabrication to access materials properties specific to 3D architectures. Direct–write, additive manufacturing using layer-by-layer deposition, or 3D printing, has emerged in recent years as a method to deposit truly 3D objects, at least over the macro- to micro-length scales. Unfortunately, 3D nano-printing methods are few. Focused electron beam-induced deposition, or FEBID, is one such 3D printing method where a focused electron beam is used to selectively dissociate surface bound precursor molecules delivered from the vapor phase. A computer–aided design environment specific to FEBID will be presented that makes the deposition of 3D complex geometries possible. Specifically, the 3D CAD environment facilitates the design and deposition of mesh style objects – examples will be presented for the deposition of metal and metal-carbon composite 3D objects. Example object geometries include cubes, icosahedron and bipyramids. A complementary simulation of FEBID will also be presented which serves as a predictive tool and aides in the design of more complex 3D deposits. The simulation is used to predict the primary electron beam coordinates and beam dwell times required for experimental 3D FEBID simplifying the design–to–experiment process flow which has historically been a mostly trial and error process.

Funding: DOE Office of Science NSRC