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 Karl Franzens University Graz

Graz University of Technology 

From UHV to Electrolyte - Combinatorial Studies in the CALMAR
Achim Walter Hassel
CD-Lab COMBOX, Institut für Chemische Technologie Anorganischer Stoffe, JKU Linz
17:15 - 18:15 Tuesday 24 March 2015 TUG P2

Various physical vapour deposition systems are implemented at the CALMAR. Electron beam deposition, thermal co-evaporation as well as an state of the art sputtering system allow fabrication of laterally graded binary or ternary samples on substrates such as 4" wafers. Moreover these systems are connected to a radial UHV distribution chamber that allows complex sample preparation. Sputtering for example is possible onto a LN2 cooled or a SiC heated substrate. DC, RF, Ar or reactive sputtering are possible with O2 or N2.

This sample preparation is coupled to a physical and chemical characterisation unit that allows translating back the local properties into compositional, structural and reactivity related properties. Methods such as XRF, XRD, SKP as well as scanning electrochemical or photoelectrochemical methods are employed for a thorough study of the systems of interest. They are complemented by external SEM, EDX, XPS and AES measurements.

Various examples will be given that illustrate the unprecedented versatility of this system including photoelectrochemical water splitting, antimicrobial coatings, high k oxides on glassy hafnium and many more.