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 Karl Franzens University Graz

Graz University of Technology 

Materials Research at MCL’s Materials for Microelectronics Department
Dr. Günther Maier
Materials Center Leoben Forschung GmbH
17:00 - 18:00 Tuesday 13 December 2016 KFU

The Materials Center Leoben’s division „Materials for Microelectronics" [1] concentrates its research activities on material based solutions for the microelectronics industry and has a wide-range of methods and a broad expertise in material characterisation as well as in numerical simulation of materials-, processes- and components at all length scales at its disposal. The research concentrates on (1) materials for 3D integration and packaging, (2) materials and algorithms for sensor technology, compatible with CMOS technology, (3) simulation-based „design for reliability“ and „condition monitoring“ and (4) method development for material characterisation and reliability analysis.

I will present three recent examples: A novel combined mechanical testing and simulation method was developed which allows to determine interface energy in multi-layered plastic materials [2]. This will be followed results from residual stress determination by nano-beam XRD [3] and Raman scattering for the local characterization of electronic devices. The third example will be the characterization of piezo-electric materials by means of in-situ high energy diffraction. The presentation will be opened by a brief introduction to Materials Center Leoben with focus on the Materials for Microelectronics and closed by final conclusions and remarks.

[1] www.mcl.at
[2] Schöngrundner, R. et.al.; Microelectronics Reliability (2015)
[3] Keckes, J. et.al.; Scripta Materialia (2012)