Karl Franzens University Graz | Graz University of Technology | |
2D and 3D SEM-based electron diffraction techniques as central tools for correlative microscopy to obtain new insights into microstructure physics and chemistry Video: https://tugraz.webex.com/meet/gerald.kothleitner The scanning electron microscope (SEM) offers two electron diffraction techniques that allow to obtain comprehensive and quantitative information about the crystalline microstructure of materials, namely electron backscatter diffraction (EBSD) with all its facets and variations, and electron channelling contrast imaging (ECCI). EBSD is the basis of 2- and 3-dimensional orientation microscopy which allows characterization of microstructures in terms of crystal structure, crystal orientation, and elastic crystal distortions. ECCI, on the other hand enables direct observation of crystal lattice defects like dislocations, stacking faults, grain boundaries and elastic strain fields, in a way very similar to transmission electron microscopy but on bulk samples instead of thin foils. |