Institute of Solid State Physics


SS22WS22SS23WS23SS24WS24      Guidelines for Master Students

Development of anti-sticking coating on micro- and nano-structured substrates prepared by Chemical Vapor Deposition
Jasmin Pfleger
Institute of Solid State Physics, TU Graz in Cooperation with JOANNEUM RESEARCH Weiz
11:15 - 12:15 Wednesday 27 January 2021 PH01150

Video: https://bigmail.TUGraz.at/outgoing/jasmin_pfleger_205641_11458/4965_de.html

In this talk, the obtainment of a highly stable anti-sticking (hydrophobic) coating on micro- and nano-structured substrates via initiated Chemical Vapor Deposition (iCVD) is discussed. The reasons for the interest in this topic are the many different possible applications of these hydrophobic coatings where their deployment is currently not possible yet due to their rather poor stability. Those include usage as durable anti-sticking coating for imprint stamps in the UV-Roll-to-Roll-Nanoimprint-Lithography (UV-R2R-NIL) developed by JOANNEUM RESEARCH, which is used for continuous and therefore low-cost imprinting of micro- and nanostructures on large-scale polymer film substrates.

Various stamp materials like micro-/nano-structured nickel and silicon as well as different crosslinkers for enhancing stability are under examination in this work. The coating applied via iCVD is based on a chemical with desired properties (high contact angle) never used with this type of technique before. Surface pre-treatment via grafting is investigated as an option for adhesion promotion of the coating on the substrate. Water contact angle measurement, atomic force microscopy (AFM) and microscopy are applied to analyse the produced thin films.