Institute of Solid State Physics
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SS22 WS22 SS23 WS23 SS24 WS24 Guidelines for Master Students
2 photon lithography for plastic micro devices Two photon lithography (2PL) is a microfabrication technique established in the last decade, combining the advantages of 3D-printing with sub-micron resolution. Micromachinery, photonics, surface design, micro-robotics, and biomedical sciences are just some of the fields mostly impacted by that technology. In this talk I’ll present an overview of the technology, materials, requirements and the challenges of this approach, focusing on state of the art examples, as well as on recent results of our group in term of micro-devices fabrication and integration in the framework of the EU funded project 5D NanoPrinting. In particular, the fabrication of integrated conformal metal paths by self-shadowing approach & conformal lift-off, the integration with silicon electronics and the ubiquitous transfer of 2PP microstructures will be presented in details. |
