Institute of Solid State Physics
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SS22 WS22 SS23 WS23 SS24 WS24 Guidelines for Master Students
In-situ characterisation of thin film wet-chemical etch processes using Quartz Crystal Microbalance Every year, constraints tighten on processes affecting the critical-dimensions of semiconducting devices. Wet etch & clean processes therefore benefit from continuous characterisation of material etch-rate and etched amount. A Quartz Crystal Microbalance (QCM) is an extremely precise gravimetric sensor, capable of measuring nanogram-scale changes of a thin film. This project, a collaboration with Lam Research Villach, explores the application of QCM to wet etching of microelectronic-relevant materials. A process was successfully established for characterising the removal of simpler (SiO2) and more complex (TiN) films |
