Institute of Solid State Physics


SS20WS20SS21WS21SS22WS22SS23      Guidelines for Master Students

Deposition of sensor materials by coupling initiated CVD and plasma enhanced ALD
Marlene Anzengruber
11:15 - 12:15 Wednesday 30 June 2021 

Stimuli responsive hydrogels show a reversible change in properties when exposed to external stimuli. A typical example is an increase in thickness due to a change in temperature or humidity. The amplitude of the response changes significantly if the polymer passes its lower critical solution temperature (LCST) as it exhibits a phase change. With the combination of a hydrogel and a piezoelectric layer, sensitivity towards temperature, humidity and pressure can be obtained.
Therefore, a novel multi-chamber deposition system is introduced which combines initiated chemical vapor deposition (iCVD) and plasma enhanced atomic layer deposition (PEALD). This all-in-one system allows for the fabrication of multilayered smart materials comprising of a hydrogel and a zinc oxide layer without interlayer contamination.
As a first step, hydrogel single layers are deposited and characterized to obtain ideal processing parameters for a highly responsive material. In a second step, both processes iCVD and PEALD are combined and the stimuli response of the multilayer material is investigated.