Institute of Solid State Physics
|
|
SS22 WS22 SS23 WS23 SS24 WS24 Guidelines for Master Students
Topographically surface-selective vapor deposition Video: https://tugraz.webex.com/meet/egbert.zojer Vapor deposition is a family of methods where gaseous reagents are typically attached on surfaces for coating purposes. Often the goal is in homogeneously thick coatings (conformal). A common failure mode on 3D surfaces is to have thicker film on external surfaces than inside cavities (subconformal). My presentation is about vapor deposition methods that are inherently surface-shape selective. The main focus is in capillary-condensation-controlled vapor deposition, where the vapor is condensed inside cavities before fixating it in place. The approach can create so superconformal coatings that they are essentially area selective, and could therefore serve future needs in various nanotechnological advances. |
